Single batch 6 flower basket slot RCA equipment for TOPCon/PERC
1、Applicable processes:TOPCon
2、Number of core channels:Positive etching channel 3
3、Cassette Spec:100~120 pcs
4、Number of cassettes:6
5、Capacity of equipment:182: ≥16,000 pcs/h;210: ≥12,500 pcs/h
6、Features:
1) With anti-channeling design, it can collect 70% liquid in the cassette to minimize different liquid channeling;
2)Through throttling control device + drain pipe + software compensation algorithm, it can realize a control accuracy at milliliter level;
3)With a distributed coil circulation system, it can improve the cassette deviation caused by circulation and intense reactions;
4)A high precision temperature control system, together with a circulation system can achieve a temperature control accuracy of ±0.5°C in the process channel;
5)With an efficient drying system, it can achieve full dryness in 600-700s depending on models (including cassette);
6) …